Clean room is a special designed room to exclude the particles in the air, bacteria and other harmful air pollutants, and the indoor temperature, cleanliness, interior pressure, air velocity and air distribution, noise, vibration, and lighting, static control within the scope of a certain demand. That is no matter how the outside air conditions change, its indoor all can maintain the original set requirements of cleanliness, temperature and humidity and pressure performance characteristic.
The main function of clean room is to control the cleanliness and temperature & humidity of the atmosphere that products (such as silicon) contact, can make the products in a good environment of production and manufacturing, this space we call it clean room. According to international practice, dust-free purification level mainly be decided according to the number of air particle diameter per cubic meter is greater than the standard number of particles. That is the so-called no dust, is not 100% no dust, but control on a very tiny amounts of units. Of course accord with standard of dust particles in the standard relative to our common dust is very small, but for optical structure, even just a bit of dust will have a very negative impact, so on the optical structure of production, no dust is the inevitable requirement.
Optical microelectronics purification engineering also name clean room, clean room is already the semiconductor, precision manufacturing, LCD manufacturing, optical manufacturing, circuit board manufacturing and biochemistry, medicine, food manufacturing and other industries indispensable important facilities. In recent years, due to the innovation and development of technology, for the product with high precision, fine miniaturization demand more urgent, such as the study of the super large integrated circuit manufacturing, has become the utmost important projects in the development of science and technology to all the countries in the world, and my company's design idea and construction technology are in a leading position in this industry.
1. The purification workshop wall, ceiling plate commonly using 50 mm thick sandwich color plate steel manufacturing, its characteristic is beautiful, strong rigidity.
Circular arc,wall, door and window frames usually manufactured special aluminum profile.
2. The ground can use epoxy floor paint or senior wear-resisting plastic floor, anti-static requirements, can choose anti-static type.
3. Return air pipe made from heat galvanized plate, stick purify PF foam plastic plate with good effect on insulation & flame retardant.
4. HEPA air supply outlet with stainless steel frame, beautiful and clean, punching sheet with aluminum plate, no rust, not stick dust, easy to clean.
Air changes: Class 100000 ≥15 times, Class 10000 ≥20 times; Class 1000≥30 times;
Differential pressure: the main workshop to adjacent room ≥5 Pa;
Average air velocity: Class 10, Class 100, 0.3 to 0.5 m/s; Temperature: winter >16 ℃; Summer < 26 ℃;Fluctuation ±2 ℃;
Humidity:45-65%; GMP powder workshop humidity: around 50%;Electronic workshop humidity is slightly higher in order to avoid static electricity;
Noise ≤65dB(A);
Fresh air make-up is 10% - 30% of total air supply; Illumination :300 Lx.
| Purification workshop partition wall arc toughened glass observation window |
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| Toughened glass purification observation window, size: 2400W*1200H(mm), the window height is 1.2 m from the ground |
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